Püskürtme

Püskürtme,[1] bir malzemenin, bir plazma ya da gazın enerji yüklü parçacıklarıyla bombardımanı sonrasında, o malzemenin yüzeyindeki mikroskobik parçacıkların atılmasıdır.[2]

Kaynakça

  1. ^ Akan, Tamer (2002). "Bakır buharı termiyonik vakum ark deşarjın karakteristikleri". İTÜ Dergisi. 1 (1). 17 Ocak 2021 tarihinde kaynağından arşivlendi. Erişim tarihi: 13 Ağustos 2022. 
  2. ^ Behrisch, R., (Ed.) (1981). Sputtering by Particle bombardment (İngilizce). Berlin: Springer. ISBN 978-3-540-10521-3. 

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