Titanium disilicide
Titanium disilicide[1]
Names
IUPAC name
Titanium disilicide
Other names
Titanium silicide
Identifiers
ECHA InfoCard
100.031.719
EC Number
InChI=1S/2Si.Ti
Key: DFJQEGUNXWZVAH-UHFFFAOYSA-N
Properties
TiSi2
Molar mass
104.038 g/mol
Appearance
black orthorhombic crystals
Density
4.02 g/cm3
Melting point
1,470 °C (2,680 °F; 1,740 K)
insoluble
Solubility
soluble in HF
Hazards
GHS labelling :
Warning
H228 , H315 , H319 , H335
P210 , P240 , P241 , P261 , P264 , P271 , P280 , P302+P352 , P304+P340 , P305+P351+P338 , P312 , P321 , P332+P313 , P337+P313 , P362 , P370+P378 , P403+P233 , P405 , P501
Safety data sheet (SDS)
[1]
Related compounds
Zirconium disilicide Hafnium disilicide
Except where otherwise noted, data are given for materials in their
standard state (at 25 °C [77 °F], 100 kPa).
Chemical compound
Titanium disilicide (Ti Si2 ) is an inorganic chemical compound of titanium and silicon .
Preparation
Titanium disilicide can be obtained from the reaction between titanium or titanium hydride with silicon.[2]
Ti + 2 Si → TiSi2
It is also possible to prepare it aluminothermically by the ignition of aluminium powder , sulfur , silicon dioxide , and titanium dioxide or potassium hexafluorotitanate , K2 TiF6 , by electrolysis of a melt of potassium hexafluorotitanate and titanium dioxide, or by reaction of titanium with silicon tetrachloride .[2]
Another method is the reaction of titanium tetrachloride with silane , dichlorosilane or silicon.[3]
TiCl4 + 2 SiH4 → TiSi2 + 4 HCl + 2 H2
TiCl4 + 2 SiH2 Cl2 + 2 H2 → TiSi2 + 8 HCl
TiCl4 + 3 Si → TiSi2 + SiCl4
Uses
Titanium silicide is used in the semiconductor industry. It is typically grown by means of salicide technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections.
In the microelectronic industry it is typically used in the C54 phase.
References
^
Lide, David R. (1998), Handbook of Chemistry and Physics (87 ed.), Boca Raton, Florida: CRC Press, pp. 4–91, ISBN 0-8493-0594-2
^ a b Brauer, Georg (1978). Handbuch der Präparativen Anorganischen Chemie, Band II . Baudler, Marianne (3rd ed.). Stuttgart: Enke. p. 1389. ISBN 978-3-432-87813-3 . OCLC 310719490 .
^ Pierson, Hugh O. (1999). Handbook of Chemical Vapor Deposition : Principles, Technology, and Applications (2nd ed.). Norwich, N.Y.: Noyes Publications. p. 331. ISBN 1-59124-030-1 . OCLC 49708617 .
Titanium(II) Organotitanium(II) compounds
Titanium(III) Organotitanium(III) compounds
Titanium(IV) Titanate compounds Organotitanium(IV) compounds
Salts and covalent derivatives of the
silicide ion
SiH4 +H
He
LiSi
Be2 Si
SiB3 SiB6 +B
SiC +C
Si3 N4 -N +N
SiO2
SiF4
Ne
NaSi
Mg2 Si
Al
Si4−
SiP, SiP2 -P +P
SiS2 -S
SiCl4
Ar
KSi
CaSi CaSi2
ScSi Sc5 Si3 Sc2 Si3 Sc5 Si4
TiSi TiSi2
V3 Si V5 Si3 , V6 Si5 , VSi2 , V6 Si5
Cr3 Si Cr5 Si3 , CrSi, CrSi2
MnSi , MnSi2 , Mn9 Si2 , Mn3 Si, Mn5 Si3 , Mn11 Si9
FeSi2 FeSi Fe5 Si3 Fe2 Si Fe3 Si
CoSi , CoSi2 , Co2 Si , Co3 Si
NiSi , more…
Cu17 Si3 , Cu56 Si11 , Cu5 Si, Cu33 Si7 , Cu4 Si, Cu19 Si6 , Cu3 Si, Cu87 Si13
Zn
Ga
GeSi +Ge
SiAs, SiAs2 -As +As
SiSe2 SiSe
SiBr4
Kr
RbSi
SrSi2
YSi Y5 Si3 , Y5 Si4 , Y3 Si5 , YSi1.4
ZrSi Zr5 Si3 , Zr5 Si4 , ZrSi2 , Zr3 Si2 , Zr2 Si, Zr3 Si
Nb4 Si Nb5 Si3
MoSi2 Mo3 Si Mo5 Si3
Tc
RuSi Ru2 Si, Ru4 Si3 , Ru2 Si3
RhSi Rh2 Si, Rh5 Si3 , Rh3 Si2 , Rh20 Si13
PdSi Pd5 Si, Pd9 Si2 , Pd3 Si, Pd2 Si
Ag
Cd
In
Sn
Sb
TeSi2 Te2 Si3
SiI4
Xe
CsSi
Ba2 Si BaSi2 , Ba5 Si3 Ba3 Si4
*
Lu5 Si3
HfSi Hf2 Si, Hf3 Si2 , Hf5 Si4 , HfSi2
Ta9 Si2 , Ta3 Si, Ta5 Si3
WSi2 W5 Si3
ReSi Re2 Si, ReSi1.8 Re5 Si3
OsSi
IrSi
PtSi
Au
Hg
Tl
Pb
Bi
Po
At
Rn
Fr
Ra
**
Lr
Rf
Db
Sg
Bh
Hs
Mt
Ds
Rg
Cn
Nh
Fl
Mc
Lv
Ts
Og
*
LaSi2 La5 Si3 , La3 Si2 , La5 Si4 , LaSi
CeSi2 Ce5 Si3 , Ce3 Si2 , Ce5 Si4 , CeSi , Ce3 Si5
PrSi2 Pr5 Si3 , Pr3 Si2 , Pr5 Si4 , PrSi
NdSi Nd5 Si3 , Nd5 Si4 , Nd5 Si3 , Nd3 Si4 , Nd2 Si3 , NdSix
Pm
SmSi2 Sm5 Si4 , Sm5 Si3 , SmSi, Sm3 Si5
Eu?
GdSi2 Gd5 Si3 , Gd5 Si4 , GdSi
TbSi2 SiTb, Si4 Tb5 , Si3 Tb5
DySi2 DySi
HoSi2 Ho5 Si3 , Ho5 Si4 , HoSi, Ho4 Si5
ErSi2 Er5 Si3 , Er5 Si4 , ErSi
Tm?
YbSi Si1.8 Yb, Si5 Yb3 , Si4 Yb3 , Si4 Yb5 , Si3 Yb5
**
Ac
ThSi
PaSi
USi2
NpSi2
PuSi
Am
Cm
Bk
Cf
Es
Fm
Md
No