Sistema microelectromecànic

Fig.1 Exemple de dispositiu MEMS : oscil·lador mecànic

Un Sistema microelectromecànic (MEMS acrònim anglès) és un sistema de tecnologia de dispositius microscòpics amb components entre 1 i 100 micròmetres, integrats juntament amb components electrònics per a processar la informació. Aquests dispositius micromecànics poden ser palanques, molles, membranes deformables, estructures vibrants, etc.[1][2]

Es poden trobar aplicacions en biomedicina, automòbil, electrònica de consum i industrial i sensòrica (sensors de força, pressió, moviment, so...) en general.[3]

Material per a fabricar MEMS

  • Silici: el més emprat en circuits electrònics.[4]
  • Polímers: materials plàstics especials.
  • Metalls: s'empren or, níquel, alumini, crom, titani, plata i platí.

Procesos per a fabricar MEMS

  • Procesos de deposició de pel·lícules de gruix micromètric.[5]
  • Procesos de fotolitografia de transferència d'un patró a un material fotosensible.
  • Procesos de gravat de patrons mitjançants líquids i vapors químics.

Aplicacions

  • Injectors MEMS piezoelèctrics per a impressores d'injecció de tinta.[6]
  • Acceleròmetres MEMS per a sistemes airbag en automòbils.
  • Acceleròmetres MEMS per telèfons mòbils, cònsoles de joc, càmares de fotografia.
  • Giroscopi MEMS per a detectar orientacions.
  • Sensors de pressió MEMS en múltiples aplicacions : pressió atmosfèrica, pressió pneumàtics, pressió arterial...
  • Micromiralls MEMS per a projectors d'imatges o vídeo.
  • Punts MEMS per a pantalles de visualització.
  • Sensor de pressió sonora per a micròfons de telèfons mòbils i similars.
  • Oscil·ladors MEMS per a patrons de rellotge.
  • Actuador lineal MEMS per a sistemes de posicionament.
  • Sensors de gas : CO2, gasos de compostos orgànics (VOC)

Fabricants de MEMS

Més destacats a 06/04/2017:

  • Micròfons de ST, kmowles, AKUSTICA, Cirrus logic, JRC, vesper
  • Acceleròmetres, giroscopis i sensors inercials d'Analog devices, ST, Colibrys, maxim, Memsic
  • Sensors de corrent de Memsic
  • Sensors de temperatura de TI,Omron
  • Càmara infrarroja d'Omron,Panasonic
  • Micromiralls d'intersil,Microvision
  • Oscil·ladors de sitime
  • Commutadors d'Analog devices
  • Detectors de gas d'ams

Referències

  1. ↑ «What is MEMS Technology?». [Consulta: 25 gener 2017].
  2. ↑ «What is MEMS? - MEMS & Sensors Industry Group». Arxivat de l'original el 2017-02-02. [Consulta: 25 gener 2017].
  3. ↑ «MEMS Journal -- The Largest MEMS Publication in the World». [Consulta: 25 gener 2017].
  4. ↑ «Materials MEMS» (en anglès). [Consulta: 25 gener 2017].
  5. ↑ «Fabricating MEMS and Nanotechnology». [Consulta: 25 gener 2017].
  6. ↑ «Introduction and application areas for MEMS». [Consulta: 25 gener 2017].

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