1.5 μm process

The 1.5 μm process (1.5 micrometer process) is the level of MOSFET semiconductor process technology that was reached around 1981–1982, by companies such as Intel and IBM.

The 1.5 μm process refers to the minimum size that could be reliably produced. The smallest transistors and other circuit elements on a chip made with this process were around 1.5 micrometers wide.

Products featuring 1.5 μm manufacturing process

• NEC's 64 kbit SRAM memory chip introduced the 1.5 μm process in 1981.^[1]
• Intel 80286 CPU launched in 1982 was manufactured using this process.^[2]
• Intel introduced a 64 kbit DRAM memory chip using a 1.5 μm CMOS process in 1983.^[3]
• Ricoh RF5C164 is a 1.5 μm silicon-gate CMOS sound chip used in the Sega CD video game console, released in 1991.^[4]
• The Amiga Advanced Graphics Architecture (initially sold in 1992) included chips such as Lisa that were manufactured using a 1.5 μm CMOS process.^[5]
• Intel used the 1.5-micron process on the HMOS-III technology.^[6]
• Intel used the 1.4-micron process on the HMOS II-E technology.^[7]
• Intel used the 1.5-micron process on the CHMOS III technology.^[8][9]

References

1. "Memory". STOL (Semiconductor Technology Online). Retrieved 25 June 2019.
2. "History of the Intel Microprocessor - Listoid". Archived from the original on 27 April 2015. Retrieved 19 April 2015.
3. Gealow, Jeffrey Carl (10 August 1990). "Impact of Processing Technology on DRAM Sense Amplifier Design" (PDF). Massachusetts Institute of Technology. pp. 149–166. Retrieved 25 June 2019 – via CORE.
4. Mega-CD Hardware Manual: PCM Sound Source (PDF). Sega. 14 October 1991. Retrieved 14 November 2020.
5. "Amiga Manual: Amiga 3000+ System Specification 1991".
6. Intel Corporation, "New Product Focus Components: 80286 Workhorses: Twice As Fast", Solutions, July/August 1985, Page 17
7. Intel Corporation, "NewsBit: Three New Pinouts For One-Megabit EPROMs Announced", Solutions, January/February 1986, Page 1
8. Rant, Jon; "CHMOS: Matching Process to Product", Intel Corporation, Solutions, January/February 1986, Page 17
9. Ormsby, Jon, Editor, "New Product Focus: Components: 82526 Works Magic Under The Hood", Intel Corporation, Microcomputer Solutions, May/June 1988, page 10

External links

• Brief timeline of microprocessor development

Preceded by 3 μm process

MOSFET semiconductor device fabrication process

Succeeded by 1 μm process